Research Of Wear Resistance And Corrosion Resistance With TiN Multi-permeation Layer Formed By Reactive Sputtering

TiN coating was extensively applied in every area of mechanics, materials, chemical engineering, electronics, and metallurgy, aerospace and so on due to its many advantages, such as high hardness, low friction coefficient, high adhesive strength, good chemical stability, good electrical conductivity and the same coefficient of thermal expansion as steels. In addition the coating was especially used as high quality cutting-tools and the surface engineering materials of abrasive particles resistance and wear resistance. Now the main methods to prepare TiN coating are as follows: chemical vapor deposition (CVD), physical vapor deposition (PVD), plasma chemical vapor deposition (PCVD), ion beam aided deposition (IBAD) etc.In the research a new technique improved was introduced mainly against some disadvantages of old methods to form TiN coating. The principles were...