| Arc ion plating which use self-sustaining cold cathode arc striking as evaporation source in vaccum, is the most advanced and widly used coating technology which have the characteriastic of high inozition ratio, high coating speed and fine film quanlity at present. In this paper, orthogonal test methode was used to optimize and improve the parameters of coating process based on preparation of TiN film, and both of nanocomposite superhard TiN/Cu and TiN/Ni film which average grain size are less than 20nm , hardness is 42GPa and 47 GPa respectively, were prepared. By using microhardness tester, X-ray diffractometer (XRD), scanning electron microscope (SEM), atom force microscope and nano-indentation instrument, the structure of phase, microscopic pattern, hardness and mechanical property were being tested, and cause-harden mechanics of nanocomposite superhard film are disscused elementary. The result showed that:1. The thickness of TiN film increase linearly with prolonging of time, and the thickness of film increase about 700nm with the coating time prolong 30 minute, the coating speed is 23nm per minute. Moreover, the thickness of film will decrease with the increase of distance between sample and target.2. The hardness of two kinds of composite films increase with the increase of N2 pressure at first, and approach to maximum when the N2 pressure is 3×10-1Pa, then it decrease sharply when N2 pressure increase continuously. With the increase of N2 pressure, the color of film turned to be dark and its surface turned to be smooth.3. In the two kinds of composite films which prepared at its best parameters respectively, the preferred orientation of (200) crystal face occurred in the structure of TiN phase, but the preferred orientation is not very apparently. The average grain size of both of nanocomposite superhard TiN/Cu and TiN/Ni film are less than 20nm, and hardness are 42GPa and 47GPa, respectively.
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