Study On Organic/Inorganic Hybrid Organosilicon Antireflective Coatings By Sol-gel Technology

Antireflective coatings by the sol-gel technique has attracted considerable attention in microelectronics, optics and other fields, because of variety of the application they are studied earliest in optical thin films. Till now, the review of the many types of AR coatings have been studied extensively and reported many times. They can satisfy the most optical technique need of the overwhelming majority. AR coatings constitute one of the most important applications of the sol-gel process, this is because of using liquid solutions to fabricate solid films with an extremely wise range of chemical compositions on a variety of substrates at relatively low temperatures. Generally, AR coatings are prepared by using tetraethyl silicate (TEOS) as precursor, formed a network-like porous particles.Due to the presence of hydroxyl groups and their loose structure, the coating is easy to adsorb water in air, which reduce the porosity and result in the decrease in antireflective property. However, preparation of antireflective coatings with hydrophobic property is a solution to solve this problem.