| Energy crisis is gaining more and more attention. How to reduce the energy consume in architecture area is also a problem concerned globally. Energy saving coating glass is a kind of architecture materials which can save energy. At the same time, more attentions are also paid on the environmental properties of the architecture glass due to the growing environment pollution. In this study, a method which can combine the energy saving property and environmental property is presented to one coating through the heat treatment of titanium nitride (TiN) coating glass.In this study, TiN films were deposited on glass substrates by atmospheric pressure chemical vapor deposition using titanium tetrachloride and ammonia as reactants, nitrogen as atmospheric and carrier gas. Afterward, the deposited TiN films were heat treated in air. The temperature and time of the heat treatment were changed and TiNxOy films were obtained. The effects of heat treatment temperature and time on the crystallization, surface morphology, electrical resistance, optical properties, photocatalysis and surface hydrophilic of TiNxOy film have also been investigated by XRD, FESEM, EDX, resistance tester and optical spectroscopy.It was found that the oxidation extent of TiN film enhanced with the heat treatment temperature increased. The concentration of N decreased but the concentration of O increased when the temperature increase. O atoms entered the TiN crystal lattice and fcc TiNxOy structure with smaller lattice constant appeared. The surface morphology of the heat treated films changed from uniform sheet-like structures to needle-like structures. When the temperature increasing, the electrical resistance of the heat treated films increased. The absorption edge shifted to ultraviolet region accordingly. The TiN film was completely oxidized into TiO2 film when the heat treatment temperature was 600℃. The photocatalytic activity of the heat treated films also increased with the temperature increasing. Furthermore, the heat treated films had surface hydrophilic property which indicated that the heat treated films had self-clean property. The effect of heat treatment time on the properties of heat treated films is similar to the heat treatment temperature.The potential application of the obtained TiNxOy films in energy saving coating area is also discussed. The films obtained under appropriate heat treatment condition had high reflectance in infrared region and some transmittance in visible region. These films also had photocatalytic activity surface hydrophilic property which indicated the films had energy saving and self-clean property at the same time. The optimal film was obtained when the heat treatment temperature was 400℃ and the heat treatment time was 60 min. The reflectance in infrared region of this optimal film was above 60% and the transmittance in visible region was30%. After 180 min irradiation of ultraviolet light, the degradation rate of the methyl orange solution was 57%. Furthermore, the film had surface hydrophilic property. Therefore, the optimal film combined the energy saving property and self-clean property. |