Study Of A Novel Nano Channel Fabrication Technique And Its Application

As a preponderating part of microfluidic chip and a major object of nano fabrication research, micro to nano scale channels have demonstrated their treasurable values in both theoretical and experimental studies, such as fluidic behaviors, nano-optics, and biomedical applications. Based on the topics of micro-fluidic behaviors in microchannel and nanochannel fabrication for the application of microfluidic chip, this dissertation unfolds closely related researches.Compared with some mainstream nanofabrication technologies, MEMS-based nanofabrication technology takes advantage of its high selectivity and benefits from its low cost, batch production capability and process compatibility. This dissertation proposed a novel fabrication technique of nanochannels via employing conventional IBE and other MEMS selectivity processes, and established a model of ion beam angle selectivity; moreover, we successfully designed three nanochannel fabrication schemes. Finally, the nanochannels were fabricated and applied in microfluidic chip to deduce the band broadening effect.,The main topics of this dissertation are presented as follows:1. the summarization of the development and application of micro-system technology and nanofabrication process, and the proposition of nanofabrication technology based on high selectivity of MEMS process and the introduction of hotpot and background of the microfluidics.2. the illustration of basic micro-fluidic theory and the analysis of its band broadening effect for the pressure-driven flow in a micron-sized channel and the micron channel's cross-section by locating double-etched nanochannels in the two comers of the sidewalls.3. the presentation of the process selectivity principle for several dry etch processes, and the illumination of the shadowing effect, or angle selectivity, of ion beam and the establishment of the model of ion beam angle selectivity and three nanochannel fabrication cases.4. the successful fabrication of the nanochannel arrays, whose width is as small as 200nm, and micro-fluidic chip in the original 2um features, and the validation of double-etched nanochannels as well as the enhancement of liquid flow rate in microchannel (through testing the two chips by the novel and conventional process respectively).In conclusion, the nanochannel arrays were fabricated by the novel MEMS selectivity process, experimentally demonstrating apparent advantages of self-alignment, low cost and high controllability. Therefore, the as-prepared nanochannels have the potential to be widely applied in the research of biomedicine and nano-optics and micro/nano fluidic behavior.