| In this paper, the theory of planar optical waveguide and development of optical waveguide material were firstly reviewed, and the feasibility of using PMMA as the core layer and PDMS as the substrate and superstrate were analyzed. Several methods of modification and preparation were compared in this paper. The modification process of PMMA with nano-silicon dioxide and dye, various physical chemistry and optical performance of polymer waveguide thin films were investigated, to improve the termal stability of materials by taking nano-silicon dioxide particales into PMMA. The ultraviolet can be utilized not only decreasing aging but also for photo-induced bleaching by control the nano-particle size.On the other hand, The samples added dipersion red 1 had nonlinear optical effect after poling because of the tropism of dye. Howerver, it can not be kept in a long time. Hydrogenous bond between nano-silicon dioxide and PMMA would restained the tropism of dye, enhancing the second order nonlinear optical effect of the film and keeping long.By using of various advanced measurement technologies it is showed that nano-silicon dioxide improve PMMA's thermal stability, the polymer thin films are able to be used at higher temperature, from 70℃to 110℃. The addition of nano- silicon dioxide has no influence on the ultraviolet absorption of film. The samples of PMMA behave second-order non-linear optical performance with addition of dye, which is enhanced by the nano-silicon dioxide: that the Electro-Optic Coefficients of Poled Polymers raise from 5. 02*10-9 to 12. 66*10-9.It is achieved that modified PMMA optical waveguide films have excellent properties and low cost. Therefore, the research work is very important, not only in theory but in practice to develop thin film optical waveguides that prepare optical thin film with low cost and good performance.
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