Nano Zirconium Nitride Coatings Corrosion Factors Research

Comparing with TiN, ZrN has better wear resistance, corrosion resistance, excellent mechanical property, excellent chemical and thermal properties, as well as the beautiful golden yellow, the higher hardness and melting point. ZrN has received wide application in surface anti-corrosion, surface decoration, as well as strengthening and improving the surface properties of materials. But the study of the manufacturing parameters, influencing on anti-corrosion property, is very little. I believe that this coating will be used in many areas if the problem resolved.In this paper, the influence of the working pressure, nitrogen flow, substrate bias and deposition temperature on coatings'anti-corrosion performance had been researched by polarizative curves and corrosion potential measurement technology. In according to the requestion of decorative coatings, we found the manufacturing parameters of the best anti-corrosion properties by cross-experiment. Through the research we found that coatings'anti-corrosion property was decided in the coatings defects,pore density and adhesion between coatings and matrix; in single parameter factor experiment, anti-corrosion property of the coatings was the best when working pressure,nitrogen flow,substrate bias and deposition temperature was 0.3 Pa, 5 sccm, -100 V and 300℃; in cross-experiment, anti-corrosion property of the coatings was the best when working pressure,nitrogen flow,substrate bias and deposition temperature was 0.3 Pa, 12 sccm, -100 V and 300℃. Considered the decorative coatings, we researched the relations between the manufacturing parameters and the deposition rate,color by single parameter experiment;we found that the deposition parameters impacted the ion concentration,types and the growth of crystal; when work pressure, nitrogen flow, substrate bias and deposition temperature were 0.3 Pa, 5 sccm, -100 V and 400℃, deposition rate of the coatings was the highest. Coatings color was significantly influenced by nitrogen flow. Within 5 sccm～20 sccm, the coatings color were shallow yellow, copper yellow, golden yellow, orange and reddish brown. As 12 sccm, the coating was golden yellow.