Synthesis Of Hydrogen Selenide And Research Of Standard Hydrogen Selenide Gas

Hyperpure gases are used in various aspects of semiconductor industry. Such hyperpure gases as H₂, O₂, N₂, Ar, He, NH₃, HCl, SiH₄, PH₃, B₂H₆, AsH₃, H₂Se, H₂Te, CF₄, CO₂ have been widely used in semiconductor industry. Hydrogen selenide has attracted increasing interest all over the world. Hydrogen selenide, source material for semiconductor industry, is mainly used for P-N node, protection layers and isothermal layers in semiconductor devices and is urgently needed in national defense and aerospace technology. Currently, Hydrogen selenide is either prepared through synthesis of hyperpure H₂ and selenium at 250℃-570℃with the maximized output at 570℃, or through decomposition reaction of selenium compound and water.In this paper, hydrogen selenide was prepared through a two-step method: selenium powder and aluminum powder were used to synthesize aluminum selenide, which can react with water to synthesize hydrogen selenide. Preparation protection system and tail gas treatment system were designed to ensure higher purity of hydrogen selenide and security of preparation system.Many analysis methods were applied to determine the purity of hydrogen selenide compound, including Fourier spectroscopy, pulsed discharge helium chromatography, gas chromatography/mass spectrometry(GC/MS) and trace water analysis, which laid a sound foundation for standard hydrogen selenide.Standard hydrogen selenide was prepared by weight and was analyzed by GC/MS devices. Our results showed that consistency and lineage of hydrogen selenide were satisfactory. Its stability test showed that standard hydrogen selenide remains stable within 1 year with changes less than 2% (RSD). Standard hydrogen selenide can be allowed to declare as the national reference gas for hydrogen selenide.