| With the development of new materials, the influence of the amount and species of trace elements in many materials on characeristic of materials became more and more important. For example, the trace elements in steel and alloy have affect on the strength and the mechanical property. The amount and species of trace elements in many wave-absorbed materials can change wave-absorbed property and wave band. So the study on making method and processing of materials needs the accuracy and precision of trace elenment determination become more and more excellent. But it is very difficult that the trace elements in materials were determined with the high-purity matrix and sophisticated matrix. At present, in the area of the Chemistry Metrology , accurate determination of trace impurity and research of the Certified Reference Materials (CRMs) of trace elements were always sophisticated and modern.In this paper, the determination method of Isotope Dillution Ion Coupled Plasma Mass (ICP-MS) was researched. According to study and certifization of principle and calibration of mass bias, mass-still and the best dilution ratio theroy, the technology of ICP-MS was discussed roundly. At the same time, the high-purity regent such as H2O, HCl, and HNO3 were prepared by the purity method of the sub-boiled still and the isothermal diffuse and the impurities in the high-purity regent were analysed. The interference of the regent was effectually eliminated and the accuracy of trace elements in high-purity H2O, HCl, and HNO3 improved.The research group applied ID-ICPMS to accurate determination of trace impurity elements in high-purity materials such as In and Cd.The mass and chemical interfence of elements and metal matrix was eliminated and revised by mass and chemistry methods.According to experiment data, the determination method of impurties in high-purity In, Cd was established. Compared with the orthodox determination method such as ICP-OES and AAS etc, ICP-MS possess the superiority of the low determination line, high accuracy and precision. The research and results of this paper could improve the determination accuracy and precision of the impurities in infrared material and semiconductor material, help to control manufacture process, reduce the cost of production and advance the level of chemistry metrology ,consummate the trace to the source systerm of the determination of chemical elements. |