X-Ray Coat Thickness Measuring Method Of Micro Ball

The measuring of coat thickness is mainly depended on metallographic method and X-ray photography, both of which have a lot of disadvantages, such as of low speed, destructive, etc. To solve this problem, X-ray diffraction method and fluorescence X-ray methods are researched.First, the mathematic models of the two methods are created based on the analysis of the principles of X-ray diffraction, Fluorescence X-ray and the geometry model of micro ball. Computer aided method is used to solve the model because of its complexity, and the corresponding simulation software is implemented.For X-ray diffraction method, the relationship between intensity of diffracted X-ray and coat thickness is calculated out according to the simulation software with the help of a standard sample whose thickness is already known. Then, the coat thickness of other samples can be calculated out by the intensity of diffracted X-ray according to the calculated relationship.For fluorescence X-ray method, the intensities of each element chosen form base and coat of micro ball are calculated. The ejection factors of the fluorescence X-rays are considered, so no standard sample is needed. The coat thickness of an unknown sample can be calculated according to experimental results of the intensity of fluorescence X-ray and the result of the model.The experiment's results show that these two methods are effective, and they are fast, convenient and non-destructive.