Research On The Important Issues Of Industrialization Of MoSi₂ Heating Element

Based on the situation of MoSi₂ development in China, this work made researches on the important issues of industrialization of MoSi₂ heating element by means of the key processes such as the raw material power and heating element processing which influenced the quality of heating element.In the preparation of high performance MoSi₂ power, NH4Cl was introduced in the MoSi₂ SHS by means of chemical oven to produce high pure MoSi₂ power in which the content of the impurity such as Fe,Cu meet to the requirement of MoSi₂ heating element used in semiconductor industry. The power product was loosen and was easy to crush and scatter; The addition of La₂O₃ had no important influence on the phase constitution, but reduced the grain size of the production which was good to prepare MoSi₂ heating element with high strength and high toughness. The influence of the addition of La₂O₃ on MoSi₂ SHS was discussed and explained its influence on the power appearance.In MoSi₂ heating element processing: an apparatus that was used to form the film on the surface of MoSi₂ bars was designed. The process could be realized by means of automatically control system of the apparatus and also it could improve the stability of the filming process and was easy to test the electrical property of the MoSi₂ bars. The test result of strength showed the strength and welbull modulus of MoSi₂ bars with film was higher than that without film. The other apparatus for jointing process of MoSi₂ bars was designed too. It was easy to realize joint of MoSi₂ bars by adjusting the jointing parameters, for example: the heating cure, jointing press and jointing atmosphere. The jointing experiments for MoSi₂ bars with diameter of theφ9mm results showed the jointing strength was very high and its welbull modulus reached to 12.43, which showed the jointing quality was stability.