Driving Performance Study Of SMA/Si Composite Diaphragm Used As Micro-Drivers

MEMS technique is a newly rising technique which developed rapidly in the 21 century, and micro-driver is one of its core technology. Shape memory alloy films'performance is superior to body material, so it has very wide application prospects in MEMS. Shape memory alloy films micro-driver based on Si has the advantage of simple structure, strong power capability, fast response, easy integration manufacture and so on, as a result, it became an important component in the micro-driver developing process.Firstly, on the basis of experimental research of literature report , the isothermal single-axial tensional stress-strain curve simulation for NiTi shape memory alloy films can be carryed out by the Liang-Rogers model, and films component concentration and temperature effect for its tensional performance was discussed. Comparison between simulation result and experiment result showed that simulation curve coincided basically with experimental curve, and the Liang-Rogers model can be used in forecasting single-axial tensional behavior of shape memory alloy films roughly, besides a little wider simulation phase transformation interval.Next, on the premision of shape memory alloy films'nonlinearity, mechanics control equation for coupling effect of NiTi shape memory alloy films and Si floor was derived by using research approach of mechanics of materials, and study and numerical simulation for NiTi/Si coupled structure driving behavior could be obtained through Matlab and dichotomy in numerical analysis. The result showed that mechanical model was reasonable, and it could describe NiTi/Si complex films'driving respond trend for a thermal circulation process well.