Research On The Principle Of Spectrum-dispersion-line Scanning Nanometer Surface 3-D Interferometric Measurement System

Nanotechnology is one of the most advanced technologies that is associated with the researches on the characteristics of the material and the interaction between materials on the atomic-scale. With the rapid development of science and technology, nanotechnology involves in more and more fields, such as mechanics, materials, biology, chemistry, etc.. Nanometer Metrology is becoming more and more important, and the measurement accuracy of it is expecting higher and higher. The interferometric measurement technology is one of the most important technologies in nanometer metrologies. The typical interferomtric measurement technologies includes the dual-frequency laser interferometer technology, the polarization-light of laser interferometer technology, grating interferometer technology, F-P interferometer technology and x-ray interferometer technology, etc..In this paper, a system research on the principle of spectrum-dispersion-line scanning nanometer surface 3-D interferometric measurement is presented, and the relevant experiments have been carried out. The system exploits the spectrum-dispersion-line to scan the measured surface to realize 3-D measurement. Compared to the technologies of point-scanning measurement, this technology has the advantages of high speed, simple configuration, and insensitivity to the drifts of the light source spectrum.The research in this paper includes the line-scanning interferometric system, grating spectral dispersion system, CCD image sensor, and LabVIEW data processing system, we have analysed the principles of the systems theoretically and have carried out the relevant experiments. We accomplished the experiments in two different bands (655nm, 1545nm), including grating spectral dispersion, interference, CCD data collecting. The work in this paper provided the necessary preparations and experiments for the future system, which is a common-route interferometric line-scanning system to measure 3-D nanometer surface.