| Transparent conductive oxide (TCO) film, a new burgeoning functional material, has upper band width, which characteristics comprises stopping at ultraviolet radiation, extraordinary transparent visible light, extraordinary reverberation at infrared ray area, low resistor, etc. Adulterating Al2O3 into ZnO to form zinc oxide with aluminum (AZO) has already become research hotspot in transparent conductive films field. They are not only affluent in source, cheap in price, innocuity, but also own good photoelectricity characteristic. Non-woven material has the rich surface area, the unique network architecture and the rich hole structure characteristic and the outstanding performance of soft, the ventilation and folding speciality and so on. Therefore, Properties of Al-doped ZnO deposited on polyester (PET) nonwoven materials which has the broad application prospect to exploiture new nonwoven electromagnetic wave shield fabric and wave-absorbing materials.In this paper, the AZO nano-structure films deposited on PET nonwoven fiber substrates were prepared by magnetron sputtering and researched into the effects of different factors on the properties of the films.Firstly, based on the sputtering power, air pressure and thickness, the fabrication parameters of AZO films optimized on PET fiber substrates are designed into an orthogonal experiment of L9(33) that is of 3 factors and 3 levels. Its sheet resistance was measured by four-probe meter, its microstructures were observed with atomic force microscope (AFM), and its transmittance were tested by UV-Vis Spectropho -tometer.Then the effects of process parameters on the properties of AZO thin films were analyzed. The best condition was obtained ultimately that is 150W in sputtering power, 100nm in sputtering thickness and 0.2Pa in sputtering air pressure. On the same parameters, sheet resistance is 1.633×103Ω/αand mean diameter of AZO nano-particles is 69.4nm.Secondly, the bonding fastness between AZO films and substrates was tested with cold & hot circulations that was circulated and dried alternately between boiling water and ice water. Its loss weight was measured by weighing. Its morphology was operated with SEM before and after the test and its roughness was analyzed by AFM. It conclusioned that the weight of the films intended to alleviate and the fastness between the films and substrates intended to be stability when the cold & hot circulations reached to 10 times. At the same time, the phenomenon of peel-off appeared obviously on the thin film surface and roughness increased from 8.8nm to 17.8nm when the cold-hot testes increased.Meanwhile, the structures and properties were affected by the cold & hot circulations. The change of pore diameters of the nonwoven fibers deposited by nano-materials were measured by apertometer. The results showed that: the average pore diameter of AZO thin films were more and more bigger from 16.6535μm to 19.3226μm along with the cold-hot circulation testes increasing, and their sheet resistances were more and more bigger. But the conductive performance was getting more and more worse, and sheet resistance of the AZO films is more 2×107Ω/αwhen the circulation tests reached to 10 times. In addition, ultraviolet lights absorbed by the AZO thin films were less and less between 300nm and 400nm UV band.Lastly, the crystal structure and crystalline properties of AZO thin films were analyzed by X-ray diffractometer. It conclusioned that the ZnO crystal constant increased with the increaseing of thickness in the AZO thin films. Anti-static properties of AZO thin films were tested with static test instrument and the result showed that antistatic properties improved markedly following the film thickness increased.
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