Research Of MgF₂ Single Crystal Processing Technology

With the accelerating pace of China's industrialization, the magnesium fluoride crystals(MaF2) have been widely used in high-tech fields, such as optical ceramics , glass and infrared devices and so on. The optical properties of magnesium fluoride crystals mainly depends on its surface quality, In order to meet its production needs, the crystal surface must achieve to super-smooth surface roughness. Chemical mechanical polishing (CMP) is more widely used in the current processing technology, it is a technology of polishing processes to achieve super-smooth surface, and it is the combination of chemical polishing and mechanical polishing. In this article, we will use this technology to polish magnesium fluoride crystal, It mainly discussed the impact of the different slurry to the polishing of quality in the chemical mechanical polishing process, combining with polishing temperature, humidity, polishing rate, polishing pressure to determine the best polishing conditions in the certain polishing fluid circumstances. The crystal morphology and optical transmittance detected by atomic force microscopy and UV - visible - near infrared spectrophotometer. By contrast, we have come to the best polishing liquid and polishing conditions of the magnesium fluoride crystal, and provide some theoretical data for Processing of magnesium fluoride crystals .it is helpful for improving China's hard-brittle materials, micro-machining technology level.