Research On High Performance Monocrystalline Silicon Furnace Heating Power Supply

Monocrystalline silicon furnace heating power supply is a kind of high power AC/DC converter, it is used to provide energy for the graphite heater inside the Monocrystalline silicon furnace. The stability of the thermal field is of great importance to the production of monocrystalline silicon, it may affect the quality of the monocrystalline silicon. So the improvement of the performance and stability of the heating power supply may largely improve the quality of monocrystalline silicon.This paper analyzes the current situation and prospects of the monocrystalline silicon furnace heating power supply, so as the characteristics of high-frequency monocrystalline silicon furnace heating power supply with digital control. Compared with the high frequence power supply, there are some problems in the traditional SCR heating power supply, for example, low power factor, large output voltage ripple, low efficiency, poor stability and so on. According to the shortcomings of the traditional SCR power supply, the technology of FB-ZVS-PWM converter is introduced into the designing of monocrystalline silicon furnace heating power supply so as to improve the electrical performance, the efficiency, the power factor and reduce the pollution to the grid.The principle, ZVS condition and the design methods of the FB-ZVS-PWM converter is described in detail, and then the design of high frequency transformer, the cooling system and the control strategy of the FB-ZVS-PWM converter is discussed. According to the analysis above, a 150kW high-performance monocrystalline silicon furnace heating power supply is produced successfully in this paper. The experiment results show that the electrical performance of the power supply has achieved the anticipatory performance, it would of great help to improve the stability of the thermal field, and the quality of the monocrystalline silicon can be largely improved too.