The Basic Research On Micro-machining Technology

Micro-machining technology is the key factor of the micro-mechanical-system. Its most typical application is the large-scale and ultra-large-scale manufacturing of integrated circuits. Micro-cutting could not be moved from micro-machining technology. In this thesis, micro-cutting technology is researched. This paper expounds the contents below:The principle that the scaling effect put on the rules of micro-machining were expatiated, the reasons for the strength changes of material in the scaling effect were analyzed with theory of dislocation. In micro-cutting, the scaling effect changes the characteristics of the materials, the surface forces take more important place in micro-cutting. When the cutting depth become smaller, the strength of the material increase, and the unit cutting force rises quickly. Because of the cutting thickness in the micro-cutting is very thin, the cutting forces drop down rapidly, and the proportion of the friction between the chip and the cutting tool increases.The cutting forces and surface roughness were measured under the condition of small feed speed and cutting depth. The relationship between the unit cutting force, the feed speed and the cutting depth approximately adapt to the equation of plastic deformation in theory of dislocation, the theory of dislocation on plastic deformation accords with the micro-cutting. The cutting depth has great impacts on surface roughness, under such condition that its dimension is close to the materials'micro-structure one. The features of scaling effect in micro-cutting were validated.The micro-cutting technology was applied to the production of the tiny parts, On the basis of mastering the law of micro-machining, the micro-machining technology can be used in processing of the key parts of the delay micro-institutions and micro-mini-transition-wheel and riding horse wheel. According to these two components of the micro-structure of size, the characteristics in designation of micro-cutting tool were addressed, the milling tools for micro-machining are designed, and the hobbing cutter with the module of which is 0.05mm was made out. Applied to micro-machining of micro-cutting forming cutter, cutter tooth to determine the step length between two points less than 6μm. Identified the cutter setup program in processing, through the design of micro-cutting molding with conventional molding cutter milling cutter designed for comparison, summed up cutting out a micro-molding tool design features.In experiment, the tool and workpiece material were carbide and carbon steel ,which are very common materials, instead of the previous study of micro-machining of using diamond tool materials, ceramics and other valuable materials as a research object, therefore the data derived from the analysis of micro-cutting of the law lay a certain foundation for the popularity of micro-machining. And, the small and medium enterprises can also involve in micro-cutting area.