Research On Precise Lapping-Polishing Equipment Reform And Technology For Floatation Cushion

With the development of precision and ultra-precise technology, the accuracy of the machinery and the detecting instrument become higher, the production accuracy of cushion needed also more higher. At present, the research about the cushion precision finishing technology is not enough. So how to enhance the accuracy it is one of needing to resolve problem of the research area of the floatation cushion.The paper mainly improved existing equipment, improved loading mode of polisher lapper, in order to achieve the polish of cushion with the structure of variable-section pressure equalizing groove, design a kind of rotation sealing by head face air film and atmolysis installation, achieve to automate polishing of cushion with the structure of variable-section pressure equalizing groove. it is of great significant to study the path and velocity of lapping process for guaranteeing the lapping quality. In this paper, based on the kinematics and geometry principle, a path equation was established and the computer simulation software was developed for figuring the path curves of the process, and discuss lapping process of the floatation cushion, systematically analyze the effect of the main process parameters for surface uniformity of the floatation cushion, it is important to ensure the surface qulity after cushion polished.The paper mainly studied the technology of cushion lapping and polishing, the process is easily to produce defects, such as nick, stress and so on, the cushion quality is important parameter of the process. The paper analyses the reasons of generation defecte basis on the principle, through changing main parameters of lapping and polishing(abrasive disk rotate speed, abrasive disk stress, barasive category, barasive grain diameter, slurry density and abrasive disk material) to test the impact parameters of surface quality, get some optimization parameters of lapping and polishing of cushion, the surface of cushion is pinch rolling, no scrach, surface roughness<0.02um, plane profile Pt<0.2um, achieve mirror finish based on the optimization parameters, proved to improve the surface quality of cushion though the study of the paper.