Study On The Scanning Probe Lithograph By Atomic Force Microscopy

The research of revolutionary nano-instrument and nano-materials has become a focus all over the world, the core of this technology: micromachining technology comes to be the key of what researchers want to breakthrough. But because of the restrict on machining principle, the traditional machining technology is not able to satisfy the developing require of the persons. The researchers put their efforts to other fields, they want to find a new way which has high accuracy and cheap cost. The scanning probe lithograph is a new promising machining technology. Mechanical lithograph is one type of SPL, its principle and machining requirement is easy, so many researchers put their focus on it. However, the existing mechanical lithograph is restrained because of poor accuracy and low machining quality, also, its machining efficiency is very low.In this paper, we choose AFM as our machining tool, and block copolymer as our machining substrate material, we develop a nano-lithograph technology under the tapping mode of AFM. From this way, some complex nano-patterns have been obtained. They have high accuracy, quality and efficiency, also, the wear of AFM tips is very light. It has overcome the weaknesses of the previous mechanical lithograph, so it has very broad developing space and application.Further, we use this technology as a data storage. We use the PS nano-array of SEBS as the storage medium to write and read the data, the theoretical storage density can reach to hundreds of GB per inch2, which is more then the storage density of the existing optical storage, magnetic storage and semiconductor storage.In addition, the storage medium SEBS we choose has the function of shape memory, the shape can recovery when put it in high temperature. So in this paper, we also study the recovery behaviour and dynamic. Because of this function, the data storage on this medium can be erased under high temperature. So we can repeatedly write and erase on this medium. It is a new idea and method for high density data storage.