Study On Micro/Nano Structures Evaluation And Surface Characterization Methods

With the improvement of ultra-precision machining technology's precision, as while as the reduction of the sizes of microelectronic devices and MEMS manufacture, the nano-processing technology formed and developing, becomes one of technical front core technologies. The measurement technology and the industrial production technology is always promoted and enhanced mutually, therefore, the measurement technology obtained a rapid development.In view of the demands of the typical characteristic size and the microscopic surface profile measurement, in this thesis the evaluation of micro/nano structures and the characterization methods of surface were studied. The major works in this thesis are as followed:1. After the micro/nano structures measuring technologies and the characterization methods of surface at home and abroad were investigated, AFM, phase shifting interferometry and white light scanning interferometry were chosen in this system to find the relationship between these methods.2. The principle of the evaluation of micro/nano structures was studied. The evaluating algorithms of micro/nano structure such as the step height, pitch and line width were explained in detail, and the processing algorithms were designed by MATLAB. The step height and the grid structure were measured by many kinds of methods.The measurement data was processed by MATLAB evaluation program; the feasibility and the reliability of these processing algorithms were verified. Line width structures evaluation model and algorithm were established many group of simulation data of the line width structure were set up to verify the feasibility of the established model and algorithm.3. The filtering technology of the information which contained in the ultra-precision machined surface, including surface deformation, waviness and roughness, was studied. The working principle and the approximate realization of Gaussian filter were analyzed, and the simulation experiment to confirm the Gauss approximate filter's reliability was carried on.4. Used different measurement methods: phase shifting interferometry, vertical scanning white light interference and atomic force microscopy carry on many group of survey experiments to the ultra precision sizing surface; The data got from different methods was analyzed and contrasted with the same parameters which for the analysis of ultra-precision surface roughness.