Micro Energy Director Array For Precise Ultrasonic Sealing Of Polymer Micro Device

With the MEMS technology's development, the polymer material has already been applied in the manufacture of MEMS components, such as microfluidic biochip, micro fuel cell, micro pump and micro valve, for its low price, low production cost, easy mass manufacture and so on. The formation of airtight microchannel network and the seal assembly of micro functional component for the MEMS device are the important elements to decide the quality of it(the micro device), and also the key step to make the polymer micro component move toward the application and mass production from the research. At present, the sealing-in technology being mainly studied has the problem and the limitation in aspects, such as the adaptability of method, the manufacturing quality and the working efficiency. Recently the research of the polymer ultrasonic welding technology has provided a feasible solution way to the situation. The ultrasonic welding has merits of the strong sealing-in intensity, no requirement for the middle medium, the good biological compatibility, and so on. And its heating way is the localized heating, which has little effect on the structure and the encapsulated shape changes for the micro devices. So it has the very good application prospect to realize the batched production of the micro component sealing-in.Polymer ultrasonic precise sealing is a very important MEMS manufacturing technology to improve the efficiency of polymer MEMS equipment bonding and sealing. In order to improve the sealing controllability, eliminate the impact of poor surface roughness and enhance the efficiency of heat production, array energy conducting construction method is developed, which used lattice projection construction instead of energy-oriented-ridge construction. Experiment is carried out using PMMA micro tube and substrate to seal. An experiment on the height and intensity of the micro energy conducting construction is implemented to find out how the polymer surface condition affected the ultrasonic sealing, in which hot embossing process is used and sound wave transmission efficiency feedback sealing mode is adapted. An ultrasonic sealing equipment is set up and analysis on polymer surface wetting condition is followed. The results showed that when the micro construction height and intensity increases, the ultrasonic energy consumption that needed to fulfill total sealing increases accordingly. The impact of micro energy conducting construction height and intensity to the sealing quality follows certain rules. But there are still some minor difference between different period of Ao (the ratio of height and intensity). By using micro energy-conduction construction, polymer melting and casting is controlled effectively, high uniformity of sealing surface is achieved and consequently high precise sealing quality can be ensured.