The Sensitivity Calibration And Transverse Sensitivity Study For The Tiaxial High G Accelerometer

Having been searched abroad the related documents, on the basis of MEMS piezoromteras objecet of study, this paper mainly research the sensitivity of high g accelerometercalibration and the transverse effect. The main contents include:(1)The Hopkinson bar device was briefly introduced, and the principle of laser dopplerwas analyzed. In the Doppler signal decoding,a kind of arithmetic about decoding the Dopplersignals was written for the sensitivity of the piezoresistive accelerometer calibration.By usingthe phase method the Doppler signals was decoded.The sensitivity of the X,Y,Z axisdirections was got,and by comparing with the primitive sensitivity,this kind of test devicesand this method of the Doppler signaldecoding was effective.(2) Because of the design of the piezoresistive silicon micro acceleromter and theprocessing technology aspects,the transverse sensitivity was always high.especially for thetriaxial accelerometer, the transverse sensitivity was a more outstanding problems. So thereason of the transverse sensitivity was analysed theoretically. And Hopkinson bar was usedto test the transverse sensitivity for one kind of a triaxial accelerometer. The transversesensitivity was high for Z axis when the X axis or the Y axis was principal axis, and thetransducer cross sensitivity ratio was over 5%. But when the Z axis was principal axis, theeffect of the transverse sensitivity for X axis or Y axis was small. And when X axis or Y axiswas principal axis,they had less influence for each other. (3) A method was proposed to improve the transverse sensitivity by analysing the reasonof the transverse sensitivity.