Research On A New AFM Device For Machining Micro-Structure And Related Experiments

Since AFM is invented, its application fields have already expanded from the original microscopic topography measurement or characterization of surface to a Nano-fabrication method. At present, AFM is the machining tool used to nano-machine different material surfaces, becoming one of AFM main application fields. But because of the small sweep range of AFM, it can not satisfy the demand of mechanical machining very well. Therefore, it is of good significance and value to study the new-type processor and do lots of research based on AFM.Through the establishment of a new machining system, this thesis succeeded to carry on the machining of a millimeter range using the atomic force microscope. Firstly, the machining system was designed and built based on AFM and two-dimensional stages. The machining with a millimeter range and nano-accuracy was realized under the premise of high resolution. Afterwards, the corresponding control system was developed, including the hardware as well as the software, and the coordinate machining of the micro-probe and stages was realized. Finally, the accuracy analysis was carried on, including the straightness, the positioning accuracy and the repeatability. And processing technique was studied through massive experiments, such as feed amount, the bias voltage, the stage velocity, the machining direction, the accuracy of system and so on. The consistency with the new AFM device carrying on wide range machining was explored. Besides, the related compensating solutions were sought for. The line arrays and the square arrays were machined, which are more than 1 millimeter in length and have nano accuracy.