Study Of Dynamic Characteristics On Elastic Micro-beam/squeeze Film System Which Considering Heating Effect

Micro-beam resonators is important components of micro-mechanical industry, microelectronics packaging often makes a layer of gases existing between the micro-beam and the substrate of micro-beam resonators, as a result of the gases'small size and the gases can't be free of expansion and compression, it will vibrate with the vibration of micro-beam, give rise to additional mass effect and additional damping effect on micro-beam, thus affect the dynamic characteristics of structure. So, it have very important theoretical significance for us to study the dynamic characteristics of elastic beam/squeeze film coupled system which considering the thermal effect, and to achieve parameter identification of such gas-solid coupled system. This paper made in the following results:1. Base on Navier-Stokes equation and energy equation, we derived One-dimensional gas-solid coupling dynamic equations of Rigid beam /squeeze film system which considering the effect of heat dissipation, and solve the temperature increment field, pressure increment field and velocity increment field of squeeze film by using Perturbation method.2. Derived 2D gas-solid coupling dynamic equations of elastic beam/squeeze film system which considering the effect of heat dissipation, and solve the temperature increment field, pressure increment field and velocity increment field.3. Established 2D gas-solid coupling dynamic equations of elastic beam/squeeze film system which considering the elastic beam's heat dissipation and the squeeze film's heat dissipation at the same time. Studied the impact of squeeze film on the dynamic characteristics of micro-beams in details, and achieved parameter identification of gas-solid coupled system.This paper break through the assumption of constant temperature, established 2D gas-solid coupling dynamic equations of elastic beam/squeeze film system which considering the effect of heat dissipation, achieved parameter identification of squeeze film inertial number and squeeze film damping number, revealed the law of squeeze film's impact on the dynamic characteristics of micro-beams, the results have important guiding significance for people designing micro-mechanical.