Structural Design And Optimization Of MEMS Universal Inertial Switch For Fuze

With the advent of the information age, the modern fuse is developing, to intelligence, miniaturization, integration, universal. The characteristics of traditional fuse such as bulky, difficult to blending the function, low reliability, what is blocked the developing of fuse. But the development of the MEMS provide the technical support for the progress of fuse. In order to suit to the fuse requirement miniaturization and the ability of resistant high overload and large angular response, in this article a new omni-directional inertial switch is designed basing on the manufacture of MEMS.The response of the spring mass system has been discussed under the half sine wave shock acceleration. According to the different displacement of the mass in different natural frequency, the best frequency for the spring mass system is selected, which the mass can has the most stable displacement under the half-sine wave acceleration with amplitude 450g impulse width lms. The arc flexibility cantilever electrode not only can prolong the contact time and avoid the bounce, but also can simply the structure and improve the rate of final product. The cross shaper barrier can not only have the ability of resistant high acceleration, but also to limit the rotational movement of the mass.The performance of the switch is simulated by finite element software. The first three modal is translational motion and the frequency is close. When the acceleration is exceed 450g, the switch can response reliability in any direction; under the shock with the amplitude 450g impulse width lms, the least contact time is 56μs. The switch can response to the acceleration with different impulse width. A new design method for the switch structure with different thresholds is discussed.At last the process of manufacture is researched. The way to control the mistake by adjustment the mask is discussed.