| The resolution of optical system can not reach its diffraction limit because of the phase aberrations caused by atmospheric turbulence and other wavefront errors. Adaptive optics technology uses deformable mirrors to perform dynamic phase modulation and endow optical system the ability to decrease the influence of dynamic wavefront errors. Micromirrors offer advantages in size, weight, speed and performance over the traditional deformable mirrors and have tremendous potential in reducing the cost and weight of adaptive optical systems. In order to facilitate the domestic application of MEMS into adaptive optics, fundamental theory and fabrication technology of micromirrors are presented in this dissertation with analysis to characterize their performance.In fundamental theory, adaptive optics, electrostatic actuation, flexure beam theory and squeeze film damping are researched;In fabrication, bulk micro fabrication process and surface micro fabrication process are researched and compared, then the structure parameters and layout of a 8 X 8 micromirror array are designed using SUMMiT foundry;In analysis, analytical and numerical method are used to perform static analysis, modal analysis, transient analysis, frequency analysis and to characterize the farfield performance of this 8X8 micromirror array.Finally, in order to realize large scale micromirror array with lower snap down voltage, advices are given for further research.
|
PDF Full Text Request