| A comprehensive introduction of energy saving coating glass, especially low emissivity (low-E) glass has been given including the development, energy saving characteristic, types and preparation methods. It shows that TiN film can be used as dominating film in energy saving coating glass for its good electric conductivity, excellent optical properties and convenient prepared method.In the first part of the thesis TiN film in different N2 partial pressure prepared by reactive magnetron sputtering is studied. The results show that the transmittances of the films are higher and higher with the sputtering total pressure increase. When the sputtering pressure keeps constant, the transmittance of the films first increase, and then decrease subsequently with the Ar partial pressure of the films increase. The XRD and TEM results show that the prepared TiN films are crystal having preferred oriental of (200). SEM results show TiN films appear compact and plane in different N2 partial pressure, and there is no big crystal grain appearance on the surface of TiN films. TEM and AFM results TiN films have the column structure, and the surfaces of the films are accumulated by crystal grain.In the second part of the thesis the effect of heat treatment processing on the optical properties and structure of the TiN films is studied. The results show that the transmittance of the films increased with the temperature rising; when the temperature >400 C the interference peak appears in the transmittance curve. When heat time >1h the transmittance of the TiN films lower. SEM results show the films are plane after being heat treatment. The cross-section SEM show there is oxygenation layer on the surface of the TiN films. The resistances of the films increase with the heat treatment temperature become higher and become bigger with the heat treatment time becoming longer, and decrease subsequently. The XPS shows the interior N atom can move to the surface of the films and distribute to the air.In the third part of this thesis, the optical properties of dual layers of TiO2/TiN and triple layers TiO2/TiN/TiO2 , and the photocatalytic performance ofTiO2/TiN/TiO2 are studied after heat treated with different condition. The results show that in double layers the transmittance become lower with the TiN sputtering time becoming longer. And the transition layer Ti between TiO2 and TiN can improve the transmittance of TiO2/TiN. In triple layers the exterior TiO2 can increase the transmittance of TiO2/TiN/TiO2, so do the transition layer Ti film between TiO2 and TiN. After treated at 300 C TiO2/TiN/TiO2 has no difference with non-heat-treated triple layers, and when treated at 400 C the transmittance of the films increase and the curve shift to the red. At 500 C the curves show interference peaks. The photocatalytic performance studies show that thrice layers have better photocatalytic characteristic. And heat treatment can improve the triple layer's reaction coefficient. Heat treatment can also change the multi-layer's (TiCVTi/TiN/Ti/TiCb) reaction coefficient. The reaction coefficient is decided by the exterior TiCVs thickness, and influenced by the N percentage on the surface of the multi-layers -, the crystal status of TiO2, and also influenced by the Na+ moved from the glass substrate.
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