Study And Realization Of The Method For Measuring The Thickness Of The Thin Films

With the development of social economy, the application of organic thin films is more and more prevalent as a sort of functionality material. Accordingly, the scope of the production of the organic thin films is enlarged. Inspecting of the quality for the thin films has been a significant process in the production of the organic thin films. Therefore, the research of the measuring technique will be provided a wide space.This paper has concluded the optical methods for measuring the thickness of the organic thin films and analyzed these methods by comparison. The advantage and disadvantage of each method as well as the precision, confines and applicable conditions of these methods have been available. This has provided reference of choosing the method for measuring the organic thin films in the industry production. Based the comments above, the theory of the laser diffraction method for measuring the thickness of the films has been investigated and summarized, and according to it we have designed a optical system for measuring the thickness of the films. Considering the actual situation in the industry production, In this system we have provided a new method for eliminating the error that was brought by the roller's eccentricity running. We have measured the thickness of two sorts of organic thin films by the system in the laboratory. Then we have compared the results to the thickness value measured by the reading microscope to inspect the veracity performance of the system., and the relatives are 2.89% and 3.53%. It meets the demand that the relative in the industry production must be less than 10%. Finally, the thickness range in which the results measured by the system were accuracy by using the system was made.