Molecule Dynamics Simulation On Gas Flow In Microchannels

With the development of precise processing technology and microelectronic technology, more and more devices of micro-electromechanical systems (MEMS) have appeared. Because of the reduction of the size of the device, a lot of microstructures have been formed. But the physical characteristic in these microstructures is influencing the performance of the device seriously. Consequently the study of non-classical macroscopic problem in the microstructure is particularly important. Utilizing the model based on molecule is becoming an important method and direction to study the micro-fluid flows now. In this paper, the velocity distribution function, three kinds of speed and mean free distance of molecule under the two-dimensional state at the time of the balanced state is analyzed based on kinetic theory and molecule dynamics. It can be found out that these parameters in two-dimensional system are different from those in three-dimensional system. Meanwhile, the molecule dynamics simulation method is introduced in detail, and the model of simulation is set up. Then detailed analysis and calculation of the collision course in simulation is carried on. Furthermore, the flow characteristics between the infinitely large platforms are analyzed under the slip velocity boundary condition. Finally, on the basis of the theoretical analysis, the molecule dynamics method is used to carry on certain feasibility research on the characteristic of gas slip flows in the micro-channel.