Research On Measurement Experiment For Grating-Measurer Dynamic Errors

At present, the static calibration technique employed for evaluating the positioning accuracy of grating-system has developed very well. As can be noted, this calibration technique does not consider the real mode of operation of the measurement system. Dynamic effects which are inherent during grating-system working affect the positional errors of the slide. The static calibration can not represent the dynamic calibration. Thus, this paper does some research of dynamic errors on grating-system.This paper designs a calibration system of dynamic errors for grating-measurer, It is based on the Hewlett Packard 5529A laser interferometer which is capable of performing dynamic errors calibration. Such method uses the A-quad-B pulses from the grating encoder as the position trigger signals. The software package of the HP laser interferometer permits the data acquisition and presentation of the dynamic errors in accordance with ISO-232 standard, and provides a realistic and detailed picture of the errors synchronously. Finally, the result of dynamic errors for grating-measurer is presented and discussed at different speed.At last, the dynamic errors of grating-measurer are decomposed and traced by fft and wavelet. And the real error components are found out, which offer a basic for error correcting. Then a brief description of Bayes modeling and prediction for dynamic errors based on standard values interpolation at intervals is presented. The Bayes modeling theory is adapted to predict the errors of grating-measurer, In the meantime, the Bayes prediction theory is proved to be suitable and reliable.