Fabrication Of Phosphosilicate Film For Optical Waveguide Materials By Sol-gel Method

In the first part of this thesis, some current fabrication methods ofwaveguide material are introduced at home and abroad. Compared with othermethods, the Sol-gel technology has the following advantages: low cost,simple equipment, treatment at low temperature, easily controlled chemicalprocess, easily doped, flexible fabrication of waveguide material, etc.High-purity and high-homogeneity materials can be gotten by Sol-geltechnology. By this method, we can not only obtain controllable componentsand microcosmic configurations, but also expediently doped active particlessuch as Nd, Er, Ce, Sn, etc in fabricated materials, which is helpful to theintegrated optical material with light amplification and photosensitivity andreach the requirement of fabrication of erbium-doped waveguide amplifier(EDWA). The phosphosilicate glass is the good host-material of erbium-dopedmaterial and it may decrease annealing temperature, which promotes theefficiency of fabricating the waveguide thin film material by the Sol-gelmethod. In my master dissertation, phosphosilicate planar waveguide thin filmmaterial was fabricated by Sol-gel method, which was the foundation ofmaking EDWA.In the second part of this paper, we explain chemical theories ofSol-gel firstly. We introduce all the steps of Sol-gel technology process:...