A Study Of Preparation And Tribological Performance Of Chromium Nitride Films

A series of CrNx films were deposited using a new mid-frequency magnetronsputtering technique, and the analyses of comprehensive properties were conductedon the films. The results show, a mid-frequency AC pulse twin-target and a pulsesubstrates bias-voltage improve the mechanical properties of the films. Highermicrohardness, better adhesion, good surface smoothness of the films are obtained inlower deposition temperature by using this technique.The orthogonal design and variance analysis were used to discuss the influences of the mainprocess parameters on roughness, surface morphology, microhardness, deposition rate,adhesion of the films deposited on HSS and stainless steel substrates. It is found inanalysis of variance that the target-power and substrates bias-voltage are the mostimportant parameters, whereas the while other parameters affect the above propertiesin more or less degree. It is also shown that surface morphology, adhesive strengthbetween film and substrate and tribological properties of CrNx films has beenimproved well by optimizing the process parameters.The tribological properties of CrNx films have been discussed. The results show,the mechanical properties and wear-resisting properties of CrNx films to depend onthe deposition processes and conditions .The wear-resisting properties of films haveno consequential association with the hardness, but have relationship with theadhesion.The films have good wear properties while their friction coefficient are low.The wear mechanism of CrNx films is adhesive wear, fatigue wear and spalling wear.