Research On The M&C System Of A Test Instrument Based On The FCM For Mechanical Properties Of Micro Components

MEMS(Microelectromechanical Systems), a kind of emerging technique involved in multi subjects, has being paid attention to and widely used in precise machining, national defense, aerospace field and so on. The mechanical properties of MEMS materials play great role in determining its function realization, performance enhancement and so on. Studying the test method for mechanical properties of MEMS materials is the key related to solve the MEMS design, manufacturing, quality control and appraisal. A kind of test instrument, suitable for measurement of MEMS materials' mechanical properties, is badly needed. The measurement and control (M&C) system is an important component of test instrument. To meet the needs of system for weak signal gathering and processing, a high presion and reliable hardware and software architecture of general M&C system is designed. The test instrument for mechanical properties of MEMS materials based on FCM (Fully Compliant Mechanism) consists of four parts, namely precision positioning subsystem including mechanical body and PZT driving power, specimen clamping subsystem, load and displacement measuring subsystem and measurement and controlling subsystem. In the M&C subsystem. DSP is used as its CPU to realize signal processing and servo control of PZT, 24 bit AD and 16 bit DA are adopted for data gathering and analog output, and the PCI bus is employed to communicates with computer . In this thesis, the following studies on precision positioning subsystem are completed:First, the importance and current situation of test instrument for mechanical properties of MEMS materials is introduced briefly.Second, the integrity introduction to test instrument for mechanical properties of MEMS materials is carried on, the function and characteristic of M&C system is also emphasized, and the system design scheme is proposed.Third, according to the M&C system hardware architecture, the key design and method of each composition module is proposed, including DSP smallest system design, data gathering module design, data output module design, programmable logical module design as well as computer interface module design. Based on hardware design, the preliminary system software design has been completed in this paper.Finally, the M&C subsystem and the precise localization subsystem are integrated into the system.System function and partial performance test are completed. The test result proves that the design of this M&C system can meet the need of testing, the scheme is accurate and feasible.The M&C system studied in this paper has provided guidance and reference significance for advanced development of MEMS materials mechanics performance test instrument, and built firm foundation for the future research.