Research On DC Electroosmotic Flow Micropump Based On The Technology Of MEMS

The Lab-on-a-Chip based on the technology of MEMS has become the rapidest research realm with its characteristics of miniaturization and integration. Microluidics system is the key part in the Lab-on-a-Chip, which has important application in the booming micro total analysis system. It uses microchannels as transporting the sample, which saves time and reduce the material waste, lowered environment pollution. Recently, in the field of microfluidics system the drive mode of flow is a key problem, DC electroosmoticflow micropump bases on the principle of electroosmosis, which control the flow in the microchannel with electric field. Recent years, It is more and more attracting people to realize it. This text is on the purpose of practical application, and the theorie and experimented of DC electroosmoticflow micropump are researched , which offers the basics of theories and experiment for the application of DC electroosmoticflow micropumps.In microfluidics systems, many parameters influence on the flow moving and control, for examples, microchannel surface characters, section shape. In this paper the main work is the research on the mechanism forming electroosmoticflow, theory analysis and simulation on the influence of the geometry parameters on the microflow. This paper reviews the development history of DC electroosmotic micropump and introduces the principle of electric double layer and DC electroosmotic micropump. The theoretical model of DC electroosmotic flow field is built based on the forming principle of the pumping rate and pressure of electroosmoticflow micropump. The numerical values of electric double layer and electroosmoticflow field are solved by using vorticity stream funcion formulation and finity difference algorithm.It shows many factors influence the pumping rate such as electric field indensity, section area, section shape, the dielectric constant and the viscosity constant of flow. Simulation is applied using the software Matlab and FEMLAB on the base of theory. Analyze and calculate the flow resistance in microchannel with various section shapes and flow velocity in microchannel with various inner diameters. Those results offer the instruction on research of flow characters in microchannel and design DC electroosmiticflow micropump.