Research On Atomic Force Probe System In Nano-Measure

The micro surface topography of super-exact mechanical accessory not only affects its using capability, but also its quality,reliability and life. The measure of super-exact surface micro-topography has became a urgent problem in the field of super-exact manufacture. The invention and application of Atomic Force Microscope ( AFM ) has greatly promoted the development of super-exact manufacture and measure technology, and provided a way to study the micro characters of the surface of super-exact mechanical accessories.Based on the principle of AFM's mechanism, with the needs of 6-DOF parallel robot with cubic millimeter movement space and nano-scale movement accuracy, and considering the openness, scope bound and reliability of the adjustment device, this paper build a super-exact device for the measurement of nona-scale surface.Firstly, the relationship of Atomic force and distance is studied. The scan type of samples and the working mode of probe is confirmed, then PZT is chosen as actuator for micro scan displacement, and optical deflexion method is used to detect the deflexion value of cantilever. After all these work, the system light path design is finished, and its mathematical model is completed.Secondly, the adjustment device for light path of the measure system is designed and key structure dimension and assemble errors is studied. Accordingly, the system mechanical structure is confirmed. For the requests of the system, the performance of components is discussed and the mode analysis of force sensor-micro cantilever is conducted in its working status.At last, as there are too large errors in the direct control of PZT, the control scheme of PID is employed and the results are content. On the platform of VC++6.0, system related control function is realize. Experiment for detecting samples'3D surface mapping is conducted, and the expected target is reached.