A Disassion About The Design For Clean Workshop In Micro-Electronics Industry

The rapid development of micro electron industry impelled the pure room design technology development, simultaneously set a higher request to the pure room design, the design of pure workshop about micro electron industry was a comprehensive technology, only after understanding completely the design characteristic of pure workshop about micro electron industry, and only designing reasonably, an outstanding project could be made. This paper took the pure workshop design of micro electron industry as the research content, had the important practical significance and big research value.This paper studied primarily the design of pure workshop for public utility specialty about micro electron industry, mainly contained the following several aspects:1. The heating and ventilation design of the pure workshop about micro electron industry. Three kind of supply air way characteristic on the purification air-conditioning system had been analyzed, and the centralism blast system design process was specifically analyzed through the project example. Regarding the high-level purification workshop. The flexible arrangement FFU blast method was proposed; this way solved the problems that the traditional blast way could not be able to adapt the craft layout and to meet the purification rank request. Regarding the partial super high lever purge area, the new microenvironment control technology (SMIF) was proposed, the construction cost was enormously reduced. Also the general air-conditioning system and waste gas processing were analyzed.2. The supply and drainage design of pure workshop about micro electrons industries. The supply and drainage design content was proposed, and the notice questions were advanced. The pure water production and the transportation principle and the method with emphasis were mainly studied, the ionic exchange technology, the reverse osmosis technology, the EDI technology and the characteristic about the pure water production were detailed. Regarding the planar mask project of the electronic screen company HDTV/SDTV, the supply and drainage design of the pure workshop was made.3. The aerodynamic design of the pure workshop about micro electron industry. The main content and method about the aerodynamic design was studied, the structure and principle of compressing air system of pure workshop were analyzed, it was proposed that the aerodynamic design must select and match the appropriate filter and the drying apparatus according to the technological requirement. Regarding the planar mask project of the electronic screen company HDTV/SDTV, The aerodynamic design of the pure workshop was carried on.