The Effect Of Thermal Process On The Conversion Efficiency Of Solar Cells

The wide use of solar cells will be a feasible way to solve energy and environmental protection problems, but the high cost is the key point to limit the large scale application of solar cell. How to improve the efficiency of solar cell is the focus in solar cells filed. In this paper we investigate the effect of the surface passivation and oxygen and carbon form on the efficiency of solar cell by the thermal process of solar cell.Firstly, Si3N4 thin films were deposited by Plasma Enhanced Chemical Vapour Deposition (PECVD), the characterization of SiN thin films was studied by spectral ellipsometry, infrared absorption spectroscopy (IR), X-ray Photoelectric Spectroscopy (XPS), quasi-steady state photocond- uctance decay (QSSPCD) measurements and reflection spectra etc. We found that Hydrogen content have relations with the minority carrier lifetimes by IR. Electric properties of solar cells had a larger improvement, comparing with after deposition of SiN films on the poly-crystalline solar cells.Secondly, we chose the big diameter single crystalline wafers with different greatly oxygen and carbon content. We use different preheating process in the course of solar cell, for example, BSF exterior and inner gettering, texturing and anti-reflection film and so on. We compare the AL gettering with B-doped crystalline thin film by changing the condition of sintering, and combine the RTP with BSF and low-high technology, we get the process condition to improve the conversion efficiency of solar cell.