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Research On The Film Quality And Particularity Of Magnetic Sputtering Coating In Large Area Glass

Posted on:2008-04-05Degree:MasterType:Thesis
Country:ChinaCandidate:Y C YangFull Text:PDF
GTID:2132360215951729Subject:Fluid Machinery and Engineering
Abstract/Summary:PDF Full Text Request
The glass surface treatment will be discussed in this paper. The film quality and particularity of Large area glass such as pin-holes adherence quality resisting abrasion uniformity, stability of chemistry optic quality quality of heating quality of electrics and so on, are analyzed and discussed in detail as soon as possible, which relate to coating equipment desposit technics coating material structure of films and many aspects of natural science. When the advancement in vacuum technique are brought forth, the involved scientific meanings are analyzed concluded generalized and summed, and we hope they will be illumined and referenced actions for the people in the same vocation.
Keywords/Search Tags:magnetic sputtering, coating, pin-holes, adherence, uniformity
PDF Full Text Request
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