Study On Processing And Measuring Ultra-smooth Surface Of The High Accurate Angles' Optical Components

With the fast development of science and technology at very fast speed, there are more and more high request to the surface roughness and figure of the optical parts. And, with the further development, ultra-smooth optical surface will be used to the optical instrument, laser, probing space body and the other sophisticated science and technology realm.Because of the enormous significance and the prominent developing foreground of the ultra-smooth surface, at present, there have been various more developed polishing methods, such as bowl-polishing, particle polishing and float polishing ect. Not only the accuracy of t figure but also the roughness of surface has been a very high processing level. The research of the ultra-smooth surface in our country is very late, So, the classical polishing method is still very familiar in our country.This thesis is mainly divided into four greatly parts: the fist part introduces the significance and application of ultra-smooth, the domestic and overseas developing actuality, advanced processing method, the main character and processing theories, the reasons and technique of using classical polishing method processing ultra-smooth; The second part analyzes the error's roots in processing high accurate angles. Through the physical modeling, math analyzing and simulating, this thesis has calculated the equation of kinematics and kinetics and simulated the change of moment and trace of movement in the polishing course. Under the bases of theories, we have done a great deal of of experiments, then we detailedly narrates eight figures, such as part low aperture and integer high aperture, integer low aperture and fringe high aperture ect. This part also introduces modifying method of the parallel error and recommends some method that they can improve roughness from filtering polishing power, tailoring polishing pad, the effects of surroundings and polishing technique. Finally, it shows the measuring picture of the ultra-smooth surface that the roughness is under 0.2nm, the angle accuracy is 5" , the figure accuracy is A/10 and this surface hasn't any flaw under the 500 multiple microscope. In the ending, this thesis gives some advice improving quality of the ultra-smooth surface; The third part introduces the elementary theories and error origin about AFM, optical profiler the integral and photon counters, analyzes the localization about Phase contrast microscope, optical microscope and electronic microscope in measuring flaw of ultra-smooth surface, narrates the method of measuring the lower surface through scattered facula, polishing section etc. At this part, we give a measuring method that doesn't scathe surface and give some advice about improving the roughness of surface; The fourth part summarizes the whole article and introduces the development trend of processing ultra-smooth.