| Energy Dispersive Spectrometer (EDS) has been widely applied to analytical field with electron probe and scanning electron microscopy, and it is the main tool of element analysis. It is very important to improve the quality of quantitative analysis, so as to improve the development of relevant scientific research and agricultural and industrial production.The paper gives a view of the structure of EDS, the system of INCA energy analysis, qualitative, quantitative analysis and application of EDS. The paper conducts a deep research in the test conditions of process time, spotsize, accelerating voltage and live time for three typical samples―glass, stainless steel and mild steel.The stainless steel, besides Fe, mainly contains alloy elements Cr and Ni, and a small quantity of Mn, P, S, Mo, V, Ti, etc. The quantitative analysis is determined by the analysis of low-content element. The optimum test conditions are obtained through changing test conditions in turn and analyzing quantitative results as listed here: process time 5, spotsize 5, accelerating voltage 20kV, live time 100s.Study on the movable elements is the key problem when precise quantitative result is considered, since K and Na cation in glass would transfer under the electronic bombardment. The optimum test conditions are process time 5, spotsize 5, accelerating voltage 18kV, live time 75s.Carbon is light element, with low energy of X-ray, low quota of fluorescence, low critical activation voltage and carbon pollution is serious, so the precision of the result of quantitative analysis is low. The k rate of carbon of quantitative analysis is processed by sensitivity curve method, thereby the precise content of carbon is obtained. The optimum test conditions are process time 5, spotsize 5, accelerating voltage 18kV, live time 100s. The corresponding equation to calculate the content of carbon is C_i = 65.27K_i-0.40. |
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