System Model Building And Function Extending Research For Micro-surface Profile Measurement Interferometer

This thesis develops the fundamental modeling and functional extend of the nanometer phase-shifting interferometer for micro-surface profile measurement. Fully introduced the whole structure, optical system and software. Theoretically gave the luminous energy analysis. Built the model of optical system using LightTools, push out the luminous simulation and compared the result with the theoretical analysis. In order to extend the measurement range, the two-wavelength measurement(TWM) was introduced, gave the analysis of it and its error compensation method. The white-light interferometry was introduced. Synthetic sources measurement was realized. The software for the measurements was developed. Through experiments on roughness samples and fiber connector, the comparison of different source synthesis was given, the measurement precision for these methods were calibrated.Major work of this dissertation:1. The whole structure and lumination system was introduced. The newly designed drive circuit was made for further synthetic sources measurement. The process of circuit adjustment was given. The function, structure of the software and parameters can be measured was illustrated.2. In order to improve the illumination condition, the optical system was built using LightTools. Theoretically gave the luminous energy analysis. Comparison and analysis was made between the two results.3. TWM was realized for the interferometer to measure aspheric optical element in the future. The reason and elimination algorithm of its error was analyzed and realized. In order to extend the depth of measurement, the white-light five-step and three-step method was realized. Synthetic sources measurement was used for accurate detection of zero-order fringe.4. Fiber-end was measured by TWM. Experiments were taken by different light sources synthesis, and the results were compared with that taken by single source method. Its error source and the compensation method were proposed. Roughness sample plate with Ra=0.8 was detected by Synthetic sources measurement. After the experiment with white-light LED using five and three-step method, the three-step method was decided to be used in future measurement. The conclusion was made after a comparison experiments: The result taken by synthetic sources measurement is better than white-light method.