Fabrication Of The Microcrystalline Silicon Materials And Solar Cells By PECVD

Microcrystalline silicon solar cells have become the focus of research in the photovoltaic field. Compared with the amorphous silicon, microcrystalline silicon cells almost have no SWE issues as well as impact of oxidation when applied in cells. What is more, the absorption spectra of microcrystalline silicon and amorphous silicon, to a certain extent, is complementary and can get more efficiency when applied in laminated cell. For that, we used RF-PECVD technology for depositing microcrystaline silicon materials and solar cells and we have studied their electrical and structural properties. This paper mainly described about some work as follows:1) In microcrystalline silicon thin film solar cells, P layer is used as window materials and it must have high conductivity and wide Eopt. We studied the effect of silane concentration and the doping percent of borane concentration on the deposition rate, raman shift, crystallinity of the film. By optimizing the deposition parameters, we gained the microcrystalline silicon film, which had high dark conductivity( 2.8×10^-5s/cm) and wide Eopt(1.87eV).2) The fabrication of amorphous silicon for N player. In order to better the ohmic contact with the metal electrode, we increased the doping percent of phosphorus concentration. As a result, we gained the film which had high dark conductivity(8.28×10^-1/cm).3) I layer is the core of the cell and the district of photo-carrier. This paper focused on the effect of substrate temperature and silane concentration on the electrical and structural properties ofμ_C-Si:H film .4) Based on the study above, this paper preliminarily studied the deposition process of the microcrystalline silicon thin film solar cells. We used P-μC-Si:H/I-μC-Si:H/ N-a-Si:H configuration,and the 3.014% efficiency of microcrystalline silicon solar cell was accomplished. 5) In addition to the initial definition of the film materials and some parameters of cells characterization, the paper also pointed to the direction of a solution to theexisting problems.