| A precision positioning servo system for micro machining tools is designed to fit the needs of mMTs practical application in domestic and abroad marker. The servo system ensures the mMTs has a hard-material machining capability by characteristics of compact size, high precision, ample force output.The compact size and ample force output are achieved using short-lead ball screw to drive the motion platform; the stable motion in low velocity circumstance is achieved using AC servo motor with high resolution encoder; the flexible and the program transplantable of the system are achieved using programmable multi-axes control card with a opening structure. The physical and mathematic models of the AC motor are established, the transfer functions of the system are calculated and the characteristic of the system is analyzed using MATLAB. According to the theoretic analyses and practical experiences, a series of paramedics are obtained which can keep the system running in an ideal state.After an aborative adjustment, the precision positioning servo system can achieve: overall size 200mm, travel: 100mm, constant force: 200N, speed: 5rpm—2000rpm, resolution: 0.5μm, positioning error:±1μm.
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