Atomic Force Microscopy And Application In Material Of ZAO Film Etc

Atomic Force microscope(AFM),which was developed 1986 and has gone through many improvements in technology and wide applications,establishes its status as a kind of surface analyzed apparatus depending on nanometer-level resolution and unlimited conduction of samples.It has made rapid development in nanometer technology field, especially in biology,life science and material science,plentiful scientific research fruits has been obtained,which widened huge developmental space for those former bottle-neck specialties.The paper firstly introduces the development of Atomic Force Microscopy,and the foundational principles of AFM,then states the whole system of the experiment equipment in this paper--Agilent PicoPlusâ…¡.Recently,nano-technology research and application are growing rapidly in depth.With the development of Atomic Force Microscope and other analysis techniques,people pay more attention on structure and properties of the material and biology in atomic-scale and nano-scale.High c-axis oriented Ti tmderlayer ZAO films on Si(100) are deposited by radio-frequency reactive magnetron sputtering.There are several characteristics of ZAO films, those analyzed and studied using Atomic Force Microscopy,such as topography,particle size, and RMS roughness.It is showed that the topography and RMS roughness of the Ti underlayer ZAO is better than that without underlayer.The particle size and roughness of two types of film change at the same trend,that the particle size and RMS roughness increase when the deposition temperature of less than 450℃,and decrease when the deposition temperature greater than 450℃.Raman spectroscopy is used to test the result,and it is found that the results of atomic force microscopy are approximately same with that of Raman spectroscopy.Armos fibers,silver colloid particles,influenza virus,and Ge₂Sb₂Te₅ films is also imaged and analyzed by Atomic Force Microscopy,and the information such as topography, particle size,and RMS roughness is obtained.The application of AFM in observation of nano-material and biology is expanded.It is proved that AFM can play a significant role in getting the information of nano-material and biology,such as topography,particle size,and RMS roughness and so on.