| Most foreign countries with the synchrotron radiation laboratory have been carrying out a wide range of ultraviolet and soft X-ray detector calibration, and so on. In this paper, we used the absolute standard detector-ionization chamber to calibrate quantum efficiency of silicon photodiode in Spectral Radiation Standard and Metrology Beamline (U26) in National Synchrotron Radiation Laboratory (NSRL), so as to provide transmitted standard detector quantum efficiency. The calibrated silicon photodiode detector can be used as a tool of scientific research to provide the original quantum efficiency, so as to ensure the accuracy and reliability of research result.At present, because of its transmission and vacuum differential performance glass capillary array has been widely used in synchrotron radiation beamlines. In this paper, we studied transmission efficiency and vacuum differential performance of glass capillary array which was used as a window material of windowless gas ionization-standard detector. The main thesis is composed of the following sub-sections:(1) Transmission efficiency and vacuum differential performance study of glass capillary arrayIn order to better understanding the performance of capillary array, we measured transmission efficiencies of glass capillary array in different ratios of length to diameter in reflectometer and studied its vacuum differential performance with the ionization chamber in U26. The experiment data are presented in this paper. When the beam incident angle is zero, single capillary inside diameter is 134μm, the calculated transmission efficiency of glass capillary array with ratio of L/D=52.2 and L/D=141.8 are the same, it is about 61%, and the measured transmission rate is about 44% and 24%. Set the higher pressure side of the glass capillary array at 120 Pa, the other side pressure is 7.6×10-2 Pa when it is pumped with TMP-110 system, which shows the differential capacity is 1.6×103 times.(2) Calibration of stable silicon photodiode as a transmitted standard detectorUtilizing ionization chamber in U26 the quantum efficiency of a silicon photodiode (AVUV-100G, IRD, USA) was calibrated in the EUV region. Photoionization cross-section of Ar also was calculated with the corresponded test data. In addition the uncertainty analysis of quantum efficiency and comparison with Samson and Suzuki's test results was presented. The metrical data show the calibrated quantum efficiency of the detector are in good agreement with the NIST's at respective wavelength, especial in the region of 5-45nm, the relative accuracy is 0-13%. It also shows the error of photoionzation cross section of Ar is less than 2.5% compared with Samson and Suzuki's, which proves the result of calibration is reliable and reasonable and the chamber is in stability status.
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