Replacement Of Electro-deposition By Unbalanced Magnetron Sputtering Method: Experimental Research And Engineering Design

To improve the surface properties like wear resistance and anti-corrosion, as well as to extend service time and to fulfill extreme environmental requirement, mechanical parts and components can be intentionally deposited by coatings with special properties. Moreover, with increasing demanding of industry upgrading and environment protection, it is practical, economical and social-beneficial to conduct replacement or updating research on those surface treatment methods with serious pollution and intensive energy consumption. In recent years, UBMS has been well-developed and considered to be promising in coating preparation. Based on this technology, the replacement research and engineering design will be the theme for this thesis, which includes three aspects:1. Literature collection, analysis and process on-site investigationAccording to literature and on-site investigation, surface treatment methods were evaluated with more emphasis on UBMS and ED. Because the disadvantages of heavy environmental pollution, intensive energy consumption and coating defections, it is in urgent need to replace hard chrome coating with a new technology.2. Experiment and analysisIn order to verify the applicability and also to get supportive data for equipment design, with special service requirements considered, Cr and CrN coatings were deposited under different conditions. According to the testing results, UBMS was proved to be applicable and the typical processing parameters were also determined.3. Design and calculation about unbalanced magnetron sputtering equipmentAccording to the experimental results and technical analysis, a UBMS-based sputtering equipment were designed special for small batch treatment of hydraulic rods. Special importance were attached to the design and calculation of deposition chamber, vacuum system, sample system, sputtering cathode and control system.