| A key research direction of Micro-electro-mechanical systems (MEMS)is Micro-opto-electro-mechanical systems (MOEMS),which blend MEMS and optical devices into one whole system。MOEMS integrate micro-opto-devices and micro-electro-devices and micro-machine into the commonly compatible materials,and exert their synthesis capabilities。Therefore,it can not only make the system minimize,as to reduce the fabrication cost of devices,but also realize the self-aligned between the optical devices。The appearance of MOEMS has accelerated the development of optic communication and space flight technique。With the advent of information age, the mainstream of optical communication technology is that devices of optical communication system are miniaturization and great arrays and low cost。 Optical switches are key devices in full optical nets,and micro-electro-mechanical systems(MEMS) optical switches have so many good virtues,which small bulk,light weight,low consummation and cost,and high resonance frequency are included,that they have great market potential and application foreground。Therefore,the theory analyzing and structure design and fabrication technology research on MEMS optical switches are very important and have great significance。It will promote the development of fiber communication enterprise。In this paper, the technology conditions of fabricating optical switches reflective micromirrors are decided, and the crystal direction alignment pattern is designed and fabricated. The reflective micromirrors, the optical fiber grooves are fabricated on (100) silicon wafers. we have studied the structure characteristics of crystal silicon and the anisotropic etching characteristics of silicon crystal in KOH solution。The characteristic of {111}side which is etched the slowest in KOH solution is used。In this paper, we expatiate the postulate of fabricating optical switches reflective micromirror witch the structure characteristics of crystal silicon and the anisotropic etching characteristics of silicon crystal in KOH solution on (100) silicon wafers, eroding on (100) silicon wafers can achieve the plumb {100} face, 45°(100)face,and 54.74°(111)face. (111)face come into being along the <110>aspect, (100) and (110)come into being along the <100>aspect. In this paper,we used the water succusof the KOH and KOH +IPA to erode the (100) silicon wafers, and analyse the obliquity of the side wall and the surface lubricity consideration,.Surface micro-machining technology and bulk-silicon micro-machining technology are used to fabricate the MEMS optical switches reflective micromirrors。In this paper,we not only researched the low press chemical vapor deposition technology (LPCVD)and incision technology and photolithography technology and reaction ion etching (RIE)technology and wet-etching technology,but also bring forward the optimized technology parameters。 ANSYS is the top FEM business application all of the word. After D.R. JohnSwanson estabilished the company ANSYS, he come out the ANSYS programme, and using it simulate engineering cinfiguration. After 30 years, It became the famous programme. In theory, We analyze and simulate the optical switch's moving witch ANSYS. The top electrode of torsion beam can be moved 31um on 50 v . It is the general same with the result of the C++ program tradition way. On this , we pave the road for the research of optical switch. The result show me that the displacement of top electrode and counter eletrode will increase witch the increasing of the voltage , and the top electrode will run down the counter eletrode very soon when the voltage reach a specifically value,even if the voltage is reduced.The insertion loss and crosstalk of optical switch are measured using stable light source and light power meter, the insertion loss of across state and reflective state is less than 2dB and 3dB, respectively. The crosstalk is less than -50dB. The insertion loss of optical switches has been analyzed by principle of single mode optical connecting lo... |
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