Study On Preparation And Heat Treating Of TiN Energy Saving Coating Glasses

Currently, the energy crisis has become more severe, thus the efficient energy saving coating glasses with excellent energy saving effect has attracted wide research interest. However, most of the efficient energy saving coating glasses are multilayer structure and deposited by off-line coating technology, which is bad for its widespread applications. In this study, atmospheric pressure chemical vapor deposition (APCVD) was applied to obtain single-layer TiN thin film on glasses, which aimed to study a new efficient energy saving coating glasses be compatible to the float glass process.TiCl4, NH3 and N2 were used as reactant and protective gases, respectively. In this study, the effects of different preparation parameters (deposition temperature, time and cooling method) and heat treatment parameters (heat treatment temperature, time and atmosphere) on the chemical composition, morphology and photoelectric properties of TiN film were investigated to adjust the solar control and low emission function of the film. XRD, EDX, SEM and UV-Vis spectra, etc. were used during the study.The results shown that the deposition temperature of TiN film is higher than 500℃. The film was crystalline until the deposition time is greater than 1 min. All TiN films shown (200) orientation growth. Vacuum colling and the increase of the deposition temperature and time can improve the crystal property and decrease N/Ti. Thus, it can improve the electrical conductivity and far infrared reflectivity, which enhance the low radiation function. On the other hand, N2 cooling, moderate deposition temperature and long deposition time was good for the improvement of solar control function. The optimum deposition conditions were the deposition temperature of 600℃,the deposition time of 90 s, and N2 cooling. Under this condition, the film had high reflectivity of 55% in the mid-far infrared region,60% average reflectivity in the near-infrared region, and transmittance of 8% in the visible region, which indicate that it can be a promising candidate as efficient energy-saving films combining the function of solar control and low emission. Furthermore, it also found out that hight deposition temperature and long deposition time will decline the reflectivity in the visible region, which is very important for the solution of the light pollution.To further improve the photoelectric properties of TiN films, the heat treatment after APCVD deposition were applied. The resuls indicated that heat treatment could polish up crystallinity, decline the N content, decrease the lattice constant, and improve the stress and defects of the films. It leaded to the improvement of the electrical conductivity. The reflectivity in the mid-far infrared region increased from 50% to 70%, and the reflectivity in the near infrared region increased from 25% to 37%. It meant that heat treatment can enhance both solar control and low emission function to make the films betterly combine insulation and heat insulation. But further increasing the heat treatment temperature and time, the energy saving properties of TiN films were worse, which is due to the enhancement of oxidation.