Structure Design And Analysis Of Small Tools

Lithography machine is main equipment in the manufacturing process of the large-scale and ultra large scale integrated circuit. Our country were not vent through the effort and continuous in the research of this aspect, but now high resolution lithography machines we are uesing are most still rely on imports. So the national science and technology major projects during the 11th five-year plan included " ultra large scale integrated circuit manufacturing equipment and the complete set technology ". This paper is one of the component. With a Small-sized projection exposure objectives (named Small tools) as the research object, carry on research of the structure design and analysis. Content mainly includes the following three aspects.Firstly,the optical instrument design on Small tools is carried on,as require proposed in the course of optical system design.Determining the bonding mode between lens and frame is point bonding application for low stress glue; The structure of frame and lens barrel is designed,considering the demands to precision and manufacturability,the frame and lens barrel are made by different materials; Design two compensation instruments, one along the axial and the other along the radial direction of the lens barrel,the two compenstion structures separately using traditional structure and flexble hinge,and because of the flexible hinge's travel is too short,the radial direction compensation instrument use macros-micro two-level adjustment structure. And ultimately determine the whole structure scheme, draw structure charts.And then, to analysis the two-freedom compensation structure along the radial direction of the lens barrel in detail.Due to the strict requirements to optical strument of the lithography machine,the flexible hinge which mainly used in precision mechanical is used in this compensation struture.propose two kinds of flexible hinge struture,static analysis is done to two structures separatly,to determine the final structure scheme for standard in the surface quality of lens.Then further finite element analysis is carried on to the selected flexible hinge,to verify the feasibility that the selected flexible hinge is able to comlete the compensation motion.;Do kinematic analysis to the simplify rigid body structure of flexible hinge and calculate trajectory of lens center;The mathematical model of the flexible hinge structure is established,carries on the stiffness matrix calculation and optimization,to determine the optimal structure in the range of allowable in structure.Finally,modal analysis to the whole structure is carried on,find its first-order natural frequency is not conform to requirements,then annlysis and study problem areas and do targeted improvements,to make the first order frequency and vibration characteristics of whole machine meet the design requirements.In the whole process of research,structure static analysis and model analysis is done with Ansys workbench software;kinematic analysis is done and 3-D model is established and 2-D charts is drawn with UG and CATIA software;flexible hinge stiffness matrix is calculated and optimized with Matlab software.The main purpose to study of Small tools is to understand the design process of high-precision optical structure such as lithography projection and the solution to the probable problem.By participating in the study of the program,has reached the goal,and designed the optical structure which meet the requirements,and the structure has also passed the review panel.