Design And Simulation Of Fiber-Optic Micro Accelerometer Based On Fully Differential Optical Path

MEMS acceleration sensor is a miniature sensor made by adopting micro mechanical processing technology. Compared with the conventional acceleration sensor, it has the advantage of light weight, small volume, low power consumption, high reliability, high sensitivity, etc. Meanwhile, its feature sizes in microns orders of magnitude make it can be applied to the measurement field which traditional acceleration sensor can't realize.MEMS acceleration sensor received widespread attention in the consumer electronics, automotive, aerospace industry, medical care and other fields. At present, the measuring principles of miniature acceleration sensor mainly concentrated in the piezoresistive pressure, the piezoelectric, capacitive on-chip structure, and research for the optical fiber sensing technology of MEMS acceleration sensor is less. Based on this, a new kind of optical fiber type MEMS acceleration sensor design is put forward in this paper, its performance data is theoretically analyzed, and the influence of different structural parameters is numerically simulated. Using a kind of new optical couplers designed in this paper, composed with sensors, optical route poor fraction will be measured structure using optical signal transmission acceleration processing. Papers on the sensor system of theoretical research, and gives the structure design principle, the measurement principle and indicators of its performance parameters of the acceleration sensor. The major work of this paper is as follows:Firstly, this paper discusses the mechanics principle of the acceleration sensor and the measuring principle of the acceleration; And introduces the basic principle of the optical fiber transmission, and the principle of optical interference, then based on this, the principle of several kinds of typical optical phase modulation type interferometer are introduced, provides theory basis for acceleration measurements, performance simulation analysis and data calculation in later section.Then, discusses on detail around the structure design and production process of MEMS acceleration sensor sensitive units, and presents the geometric parameter, production methods and process flow to determine the MEMS sensitive. It also gives the circular fiber coupling ring basic principle of the transmission units used by sensor, and discusses its role.Finally, the parameters of MEMS acceleration sensor sensitive element are simulation analyzed using software, presents the relationship between acceleration and measured optical signals, and calculates the sensor's resolution , multi-range and other performance data. Analyze the influence of sensor unit design parameters for the measurement value of acceleration according to the simulation data, provides theory basis for its future manufacturing. This paper also discussed simply on the main noise source of the MEMS sensor acceleration, and advances the possible solutions based on this.